Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Last updated ISSN 2166-2746
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena is an academic journal in engineering. It is a subscription journal. Its article processing charge is not published.
Is your paper a fit?
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What it publishes
Recent work in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena concentrates on these topics, taken from its published record rather than from its own description:
- Semiconductor materials and devices
- Advancements in Photolithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- GaN-based semiconductor devices and materials
- Nanofabrication and Lithography Techniques
- ZnO doping and properties
- Ion-surface interactions and analysis
- Nanowire Synthesis and Applications
- Semiconductor Quantum Structures and Devices
- Advancements in Semiconductor Devices and Circuit Design
Key facts
| Publisher | Not recorded |
|---|---|
| ISSN | 2166-2746, 2166-2754 |
| Subject area | Engineering |
| Access | Subscription |
| Article processing charge | Not published |
| Indexed in | Web of Science — Science Citation Index Expanded · Scopus |
| Articles published | 4,537 |
| Publishing since | 2010 |
| Journal website | scitation.aip.org/content/avs/journal/jvst |
Facts come from OpenAlex, DOAJ and Wikidata and may lag the journal’s own pages. Check the publisher’s site before submitting. Indexing shown here is what is recorded, not a complete picture — about a third of journals have no indexing recorded anywhere we can read, so “not recorded” does not mean a journal is absent from Scopus or Web of Science.
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