Journal of Vacuum Science and Technology
Last updated ISSN 0022-5355
Journal of Vacuum Science and Technology is published by American Institute of Physics in engineering. It is a subscription journal. Its article processing charge is not published.
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What it publishes
Recent work in Journal of Vacuum Science and Technology concentrates on these topics, taken from its published record rather than from its own description:
- Semiconductor materials and devices
- Electron and X-Ray Spectroscopy Techniques
- Metal and Thin Film Mechanics
- Ion-surface interactions and analysis
- Surface and Thin Film Phenomena
- Semiconductor materials and interfaces
- Advanced Chemical Physics Studies
- nanoparticles nucleation surface interactions
- Copper Interconnects and Reliability
- Advancements in Photolithography Techniques
Key facts
| Publisher | American Institute of Physics |
|---|---|
| ISSN | 0022-5355, 2331-1754 |
| Subject area | Engineering |
| Access | Subscription |
| Article processing charge | Not published |
| Indexed in | Scopus |
| Articles published | 5,546 |
| Publishing since | 1964 |
| Journal website | scitation.aip.org/content/avs/journal/jvst |
Facts come from OpenAlex, DOAJ and Wikidata and may lag the journal’s own pages. Check the publisher’s site before submitting. Indexing shown here is what is recorded, not a complete picture — about a third of journals have no indexing recorded anywhere we can read, so “not recorded” does not mean a journal is absent from Scopus or Web of Science.
Journals like Journal of Vacuum Science and Technology
Other established journals in engineering, if this one is not the right home for your paper: