Journal of Micro/Nanolithography MEMS and MOEMS
Last updated ISSN 1537-1646
Journal of Micro/Nanolithography MEMS and MOEMS is published by SPIE in engineering. It is a subscription journal. Its article processing charge is not published.
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What it publishes
Recent work in Journal of Micro/Nanolithography MEMS and MOEMS concentrates on these topics, taken from its published record rather than from its own description:
- Advancements in Photolithography Techniques
- Nanofabrication and Lithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Optical Coatings and Gratings
- Electron and X-Ray Spectroscopy Techniques
- Advanced MEMS and NEMS Technologies
- Advanced Surface Polishing Techniques
- Photonic and Optical Devices
- Mechanical and Optical Resonators
- Force Microscopy Techniques and Applications
Key facts
| Publisher | SPIE |
|---|---|
| ISSN | 1537-1646, 1932-5134, 1932-5150 |
| Subject area | Engineering |
| Access | Subscription |
| Article processing charge | Not published |
| Indexed in | Web of Science — Science Citation Index Expanded · Scopus |
| Articles published | 1,685 |
| Publishing since | 2002 |
Facts come from OpenAlex, DOAJ and Wikidata and may lag the journal’s own pages. Check the publisher’s site before submitting. Indexing shown here is what is recorded, not a complete picture — about a third of journals have no indexing recorded anywhere we can read, so “not recorded” does not mean a journal is absent from Scopus or Web of Science.
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